| 摘要 |
PURPOSE:To obtain a beautiful diamond diaphragm which is used for a speaker without strains and damages, etc. by growing a diamond thin film in a vapor phase on a base body having heat resistance and low thermal conductivity, and heating the contact surface between the thin film and the base body to release the thin film. CONSTITUTION:A diaphragm-shaped base body 1 is made of a material having heat resistance and low thermal conductivity such as Mo and silicon. The base body 1 is placed in an electric furnace, etc., and a diamond thin film 4 is grown on the base body 1 by passing a gaseous mixture 2 of hydrocarbon and hydrogen, and heating with a heater 3 provided above the base body 1. After cooling, a heating beam of light from an infrared lamp or a heater 5 is irradiated and transmitted through the thin film 4 to heat the surface of the base body 1. At this time, the temp. of the base body 1 is not so much elevated as the temp. of the thin film 4 having low thermal conductivity is elevated. The thin film 4 is thermally expanded due to the temp. difference, and released from the base body 1 to obtain the diamond diaphragm. |
