| 摘要 |
PURPOSE:To improve workability by minutely revolving a rotary stage through the relative transfer in the vertical direction between a sloped groove and a follower. CONSTITUTION:The driving source of the minute revolution mechanism of a rotary stage 13 is constituted so that the rotary stage 13 is minutely revolved by the relative transfer in the vertical direction between a follower 17 and a sloped groove 16 formed onto the peripheral surface of the rotary shaft 14 of the rotary stage. Therefore, the construction is made very simple and free from step driving, and therefore, an apparatus having the superior workability and free from the vibration of the rotary stage can be obtained. |
