DISPOSITIF DE SURVEILLANCE ET DE COMMANDE DE PROCESSUS PLASMIQUES,申请号FR19800024994-传众专利搜索

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发明名称	DISPOSITIF DE SURVEILLANCE ET DE COMMANDE DE PROCESSUS PLASMIQUES
摘要
申请公布号	FR2470384(B1)	申请公布日期	1985.07.26
申请号	FR19800024994	申请日期	1980.11.25
申请人	LEYBOLD HERAEUS GMBH	发明人
分类号	H01J49/10;(IPC1-7):G01N27/62;H01J37/32	主分类号	H01J49/10
代理机构		代理人
主权项
地址

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