| 摘要 |
PURPOSE:To keep the polarity of a protection layer stable by inhibiting the evaporation of Bi doped in an active protection layer by a method wherein the surface of a burial crystal substrate is coated with an vapor containing Bi in case of growing a buried layer on the substrate. CONSTITUTION:The burial crystal substrate 1 is set up in a carbon boat 11. A boat slider 12 is provided with a chamber 13, which is then filled with the vapor of Bi or a Bi-containing substance. For this purpose, a shelf 14 is formed in the chamber 13, and Bi or Bi-containing substance 15 is placed thereon. With an increase in temperature in the chamber 13, the vapor containing Bi is evaporated. A cap 16 is put over the chamber so that this vapor does not escape, and this situation is kept to immediately before the growth of a burial layer. |
