| 摘要 |
PURPOSE:To measure a normal line at the contact point of a three-component force detection probe and an object to be measured, by calculating the repulsive force direction generated when the three-component force detection probe is pressed to the object to be measured. CONSTITUTION:A three-component force detection probe 1 capable of detecting forces in directions (x), (y), (z) is pressed to an object 2 to be measured. A positional determination apparatus 3 changes the positions of the three-component force detection probe 1 in directions (x), (y), (z) and the posture thereof around a y-axis. The three-component force detection probe 1 consists of a base 4, a leaf spring 5, an elastomer 6 and a probe needle 7 and two strain gauges 8 are adhered to the leaf spring 5 so as to make the centers thereof symmetric. Further, two strain gauges 9 are adhered to the elastomer 6 at a part becoming thin in an x-direction while two strain gauges 10 are adhered at a part becoming thin in a y-direction. By connecting strain gauges 8-10 to a bridge circuit, components in directions (z), (x), (y) acting on the probe needle 7 can be indenpendently detected by the strain gauges 8-10. |
