| 摘要 |
PURPOSE:To make it possible to rotate a substrate when a magnetic layer is formed, by supporting the substrate and a substrate holder freely rotatably and making it possible that a substrate backup jig which presses the substrate rotates the substrate. CONSTITUTION:A substrate 22 has the circumferential edge part held between a pair of ring-shaped substrate holders 31a and 31b provided with through holes having a prescribed diameter and is fixed by bolts. The circumferential edge part of the substrate holder 31a is supported freely rotatably by a roller 31d provided on a square supporting plate 31c having a through hole larger than the substrate holder 31b to constitute a carrier structure 35. The substrate 22 is kept at an optimum temperature by a substrate backup jig 8 while rotating in the direction of an arrow together with substrate holders 31a and 31b through the roller 31d. A magnetic layer is formed on the substrate 22 by sputter particles of a magnetic material from a target 12, and this magnetic layer is more uniform because the substrate 22 is rotated.
|
