| 摘要 |
A transformer assembly particularly adapted, among other possible uses, for use in ring field illumination systems such as, for example, systems used in microlithography, said optical transformer assembly including an elongated member of glass or fused silica having a nearly circular or rectangular shape at one end for receiving a non-uniform input beam of light and through a gradual transitional intermediate section to an arcuate shape at the other end for outputting a uniformly illuminated arcuate shaped beam of light.
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