| 摘要 |
PURPOSE:To improve photosensitivity, durability, etc. by incorporating N at the concn. distribution different in specific three regions into the 1st amorphous layer of a photoreceptive layer provided successively with the 1st amorphous layer contg. Si and Ge and the 2nd amorphous layer contg. Si and C on a base. CONSTITUTION:The 1st amorphous layer 104 having the 1st layer region G105 contg. Si and Ge and the 2nd layer region S106 contg. Si without contg. Ge is formed on a conductive base 101. The 2nd amorphous layer 103 contg. Si and C is formed on the layer 104 to provide a photoceptive layer 102 having the three-layered constitution consisting of the layers 105, 106, 103. The Ge in the layer 105 in the layer 104 is distributed so as to be uniform or to decrease in the layer thickness direction. The layer 104 is formed by dividing the concn. distribution of N therein into the three regions C(1), C(3), C(2) successively from the base side in such a way that C(3) alone is not made max. and the other two are not ''0'' and are not equal when any one among C(1), C(2) and C(3) is ''0''. S/N is thus improved and the image having high quality is obtd. |
