发明名称 PRODUCTION OF SINGLE CRYSTAL INGOT
摘要 PURPOSE:To stabilize the condition of the growth of single crystal in the production of a semiconductor single crystal by zone-melting in a sealed quartz ampule, by selecting the thermal expansion coefficient of the heat-dissipation material close to that of quartz. CONSTITUTION:For example, in the production of an HgCdTe single crystal ingot, Hg, Cd and Te are melted in a sealed quartz ampule 1 at specific ratios, and the solution is cooled and solidified to obtain a polycrystaline HgCdTe ingot. The ampule 1 is opened, a heat-dissipation material 3 having convex face and Te powder 4 used as solvent are put into the ampule, and the ampule 1 is sealed again. The powder 4 is melted by heating the ampule in a vertical furnace under a temperature profile wherein the highest temperature zone at the initiation of the growth of single crystal is at the position of the powder 4. The heat-dissipation material 3 is made of a material having a thermal expansion coefficient of close to that of quartz. The gap between the ampule 1 and the heat-dissipation material 3B can be narrowed by this process, and accordingly, the intrusion of the solvent Te 5 in the gap is prevented, and the amount of the liquid 5 can be maintained at a definite level.
申请公布号 JPS60137890(A) 申请公布日期 1985.07.22
申请号 JP19830244534 申请日期 1983.12.27
申请人 FUJITSU KK 发明人 YOSHIKAWA MITSUO;ITOU MICHIHARU;UEDA TOMOSHI;MARUYAMA KENJI;SAITOU TETSUO
分类号 C30B13/16;C30B13/02;H01L21/02;H01L21/368 主分类号 C30B13/16
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