| 摘要 |
PURPOSE:To reproduce any input waveshape correctly by providing a multiple integrating compensation circuit on the input side of a servo amplifier and feeding back a displacement amount, a speed amount and an acceleration amount of a piston and an oscillation table to a path between the amplifier and the circuit. CONSTITUTION:A multiple integrating compensation circuit 16 is provided on the input side of a servo amplifier 1, and a displacement amount, a speed amount and an acceleration amount of a piston 5 and an oscillation table 16 are fed back to a path between the servo amplifier 1 and the multiple integrating compensation circuit 16 through feedback compensation circuits 19, 20. By this, influence of external disturbance working on an exciting device due to effect of load characteristic can be compensated, so any input waveshape can correctly be reproduced to improve control performance.
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