| 摘要 |
PURPOSE:To prevent the loss due to exuding of light by forming a buried layer in a striped groove of high and low refractive index layers. CONSTITUTION:A clad layer 22, an active layer 23, a clad layer 24, and a current blocking layer 25 are sequentially grown on an n type GaAs substrate 21. Then, a resist 31 is coated on the layer 25, a striped window is formed on the resist 31, and with the resist 31 as a mask the layers 25, 24 are etched to form a striped groove 32. Then, the first coating layer 26 having a large refractive index, the second coating layer 27 having a small refractive index and a p type GaAs coating layer 28 are formed.
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