PLANAR MAGNETRON SPUTTERING METHOD

摘要

PURPOSE:To reduce the number of foreign matter sticking on a substrate by making the direction of an electric field and that of a magnetic field parallel to each other on the boundary between plural target members to inhibit abnormal electric discharge on the boundary. CONSTITUTION:Plural target members 801-803 are arranged on an electrode 102. At least one of the members is made of a material different from the material of other members. The direction of an electric field and that of a magnetic field are made almost parallel to each other on each boundary between the members, and the principal faces of the members 801-803 are sputtered. By this method the number of foreign matter sticking on a substrate 110 is reduced.