| 摘要 |
PURPOSE:To obtain an exact tracking and a position measured value of a good quality by using a scanner provided with high speed and high speed deflecting devices. CONSTITUTION:A fixed station 100 of a tracking device is constituted of an optical beam generating device 110, a modulating device 111, scanners 130, 140, a splitter 150, a detecting device 170, and their control device 180. Also, a mobile station 200 is constituted of a reflecting means 210 of an optical beam LB1, a splitter 220 and a demodulating device 240. In this case, the scanners 130, 140 of the fixed station 100 are constituted of a low speed polarizing device 130 and a high speed polarizing device 140. In this way, as for a large movement of a slow amplitude of the mobile station 200, and quick movement of a small amplitude of said station, the laser beam LB1 irradiated from the fixed station 100 can be made to follow sufficiently by the device 130 of a low speed side and the device 140 of a high speed side, respectively. |
