| 摘要 |
PURPOSE:To contrive to accurately transfer information on a wafer process control by a method wherein a magnetic card, whose shape is substantially the same as that of a semiconductor wafer, is used as a mamory medium for wafer information. CONSTITUTION:A plastic magnetic card 10 is the same as a semiconductor wafer in shape. A magnetic memory part (magnetic material) 13, wherein all information requisite for a wafer process control have been written, is inserted in the magnetic card 10 and a lot number and an item name are filled in a label 14. The magnetic card 10 is housed in a carrier 1 along with a wafer 3 and is sent to the following process. According to this constitution, neither full-in miss nor readout miss generates, because the full-in and the readout of information are automatically performed. Accordingly, information requisite for the wafer process control can be accurately transferred to the following process, thereby enabling to rationalize the whole process. Moreover, the magnetic card can be easily distinguished from the wafer, the magnetic card is set in an automatic readout device for reading out information, the information is processed by a computer and the wafer process is controlled. Or, information is automatically filled in the magnetic card, and the magnetic card is automatically housed in the carrier along with the wafer, which finished a process, and is sent to the next process. |
