| 摘要 |
PURPOSE:To hold good vacuum reference voltage and to prevent the titled sensor from scaling up, by adhering the side surface of a pedestal to a base through sealing glass while adhering a gauge part to the pedestal through a gold/silicon alloy material. CONSTITUTION:The side surface of a pedestal 5 is adhered and fixed to a base 1 through sealing glass 4 so as to cross the surface of said base 1 at right angles. The pedestal 5 and a gauge part 10 are fixed by a gold/silicon alloy material 8 and a lead pin 2 receives gold plating. A cover 3 is fixed to the base 1 under vacuum by welding to form a vacuum chamber 11. Therefore, the materials of the adhered parts are prevented from flowing out upon melting and the vacuum chamber 11 can always hold definite reference pressure and the bonding strength between the base 1 and the pedestal 5 is high and scaling-up can be prevented. |
