发明名称 DEFECT INSPECTING DEVICE
摘要 PURPOSE:To save the labor for inspection and attain its rationalization by converting outputs of reflected light beams from planes at both sides formed bounding on each other about a ridge line into binary signals, and comparing the numbers of a period in which a direction change points of the track of an address position is detected continuously with a specific value. CONSTITUTION:A body 1 to be inspected is moved in parallel by a conveying device 2 in the direction of the ridge to be inspected, and a linear light beam which has narrow beam width in the direction of the ridge line and specific- spread beam width in a plane perpendicular to the ridge light is projected by a light projecting device 3. A photoelectric converting device 4 converts tracks 11 and 12 of a reflection point into electric signals, which are stored in the pattern storage device in a signal processor 5. Then, the signal processor 5 converts the output of the photoelectric converting device 4 into a binary signal, which is inputted to the pattern storage device. The photoelectric converting device 4 is controlled so as to operate intermittently at a specific period.
申请公布号 JPS60131412(A) 申请公布日期 1985.07.13
申请号 JP19830240453 申请日期 1983.12.20
申请人 MITSUBISHI DENKI KK 发明人 SHIYUDOU YUUKICHI;IWAI SHIGEO
分类号 G01B11/24;G01B11/30;G01N21/956 主分类号 G01B11/24
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