| 摘要 |
PURPOSE:To manufacture a low-dislocation density single crystal by constituting a pulling shaft of a central shaft and an outside tube which are coaxially arranged with a clearance in between, closing hermetically the part between the lower end of the outside tube and the central shaft, and packing a heat insulating material in the clearance. CONSTITUTION:A pulling shaft 12 consists of a central shaft 13 and an outside tube 15 having appropriate thickness (t) which are coaxially arranged with a clearance 14 in between. The part between the lower end of the outside tube 15 and the central shaft 13 is hermetically closed with a bottom plate 16. The clearance 14 is packed with a heat insulator 17 such as an Al2O3 fiber, a zirconia fiber, and a quartz fiber, or made vacuous. The central shaft 13 and the outside tube 15 are constituted of Mo, Ta, W, carbon, or boron nitride. |
