| 摘要 |
PURPOSE:To eliminate the possibility of the adhesion and contamination of dust, and to prevent damage by mounting a carrier moving mechanism moving a wafer under a reciprocative state and a driving mechanism moving and shifting the wafer into a second carrier. CONSTITUTION:A first carrier receiver 20 and a second carrier receiver 21 are positioned at first positions first, and a first carrier 22 receiving a wafer 1 and an empty second carrier 23 are each supported to said receivers. A tilting base 10 is inclined previously to the left first. The first and second carrier receivers 20, 21 are positioned at second positions by driving a motor. The wafer 1 is pushed and moved to the right by a roller 41 by operating a cylinder 39, and put into the second carrier 23. When the tilting base 10 is tilted downward to the right, on the contrary, the wafer 1 slightly rolls by its own weight, collides with a bottom section 47 and stops. The cylinder 39 is drawn in, the motor is reversed, and the first and second carrier receivers 20, 21 are returned to the first positions. |
