| 摘要 |
PURPOSE:To accelerate a responsive speed as well as to improve turning accuracy and resolution either, by making an operating lever inside a base's concave part infinitesimally turn in a way of utilizing expansion inherent in a piezoelectric element, in case of an infinitesimal turning device to be applied to a semiconductor manufacturing plant or the like. CONSTITUTION:Each of piezoelectric elements 26a, 26b, 27a and 27b is impressed, making them into expansion each, then each of levers 24a, 24b, 25a and 25b is made contact with an inner surface of a concave part 11, and each of their positions is locked thereto. At this time, both turning piezoelectric elements 31a and 31b are kept in a state of being contracted. In time of infinitesimal turning, these piezoelectric elements 26a and 26b are contracted and, after pressure contact between these levers 24a and 24b and a base 1 is released free, when these turning piezoelectric elements 31a and 31b are expanded in length, levers 24a and 24b are turned and displaced with a butterfly motion part 23 as a fulcrum point. Next, piezoelectric elements 26a and 26b are expanded, while lever 24a and 24b are locked to the base 1, contracting these elements 27a and 27b instead, and these turning piezoelectric elements 31a and 31b are contracted as well. At this time levers 25a and 25b turns at an infinitesimal angle by elastic force of the butterfly motion part 23. |
