| 摘要 |
PURPOSE:To automate fully the process from pretreatment to masking by devising a printer into a lateral type and so that a bagged film is opened, and standing and clamping a substrate and switching three substrate clamping means of a robot selectively. CONSTITUTION:A substrate is treated as specified while placed on lock means provided in respective tanks, i.e. degreasing tank 3, flon drying tank 8, and developing tank 11 used in the treatment process, and the substrate is treated or stocked as specified while held nearly upright and both side ends are received and clamped from both sides by clamping means equipped in a coating tank 13, heater drying tank 14, and stock means 19 for cooling after a heater drying treatment. Then, the upper end of the substrate is clamped from both sides and dipped in a photosensitive solution without dipping the clamping means of the robot 1 in the photosensitive solution in the coating tank 13, and the substrate is elevated slowly and taken out. |
