| 摘要 |
PURPOSE:To improve positioning accuracy by readjusting the position of the X direction using a positioning pin, the Y direction using an insertion lever and a level end face lever and the Z direction using a contact flat surface lever. CONSTITUTION:A cam 61 advances and actuation surfaces 64 and 64 are press- contacted to cam rollers 47 and 47. Insertion levers 31 and 32 are rotated against the force of springs 38 and 38 and tip sections 40 and 41 are rotated and separated outward. Pins 46 and 46 are made to touch the inside end of a long hole 51 and contact flat surface levers 33 and 34 are also rotated in a body. A grid group is inserted and three positioning pins 24, 25, and 26 and electron beam permeation holes 5, 6, and 7 are engaged. When the cam 61 is receded, the flat surfaces 50 and 50 of the contact flat surface lever are made to approach from the lower both sides of the grid group and the grid group is supported on a flat surface in parallel to pins 24 to 26 and then rotation is stopped by stoppers 52 and 52. The pins 46 and 46 are separated from the inside end of the long hole and one-end sections 40 and 41 are made to approach by the springs 38 and 38 and are made to touch the grid side and then press the grid to the level end face. |
