摘要 |
PURPOSE:To increase the film forming speed and also to improve the orientation of magnetic film with a vacuum evaporating device for production of magnetic film, for example, by driving a base film along the depressed surface side of a blet. CONSTITUTION:A belt 14 is driven along a prescribed curve, and this belt 14 and a base film 12 have the electromagnetic attracting force of static electricity, magnetism, etc. At the same time, the film 12 is driven at the same speed as the belt 14 and synchronously with the belt 14. Thus the film 12 is driven along said curve with a close contact secured to the depressed surface side of the belt 14. This eliminate the conventional need to control the steam incident angle by means of a mask with a vacuum evaporating device for production of mgentic film for example. Thus the film forming speed can be increased with input of the vapor having an accurate indicent angle component. This improves both the productivty and the orientation properties of a magnetic film.
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