Magnetron cathode for atomising ferromagnetic targets

摘要

Magnetron cathode for atomising targets made of ferromagnetic materials. A cathode base body (2) has at least one seat (4a, 4c) for the target and a magnet system (6) with magnetic poles of opposite polarity which are continuous around the periphery, lie within one another and are separated by an interspace (5a). The target is divided by at least one air gap (14), which is geometrically similar to the course of the interspace, into at least two target parts (12, 13), which are disposed in a staggered manner in the depth direction of the cathode on the at least one seat (4a, 4c). According to the invention: a) the magnet system (6) is disposed behind the seat (4a) set back furthest for the target (12, 13) and b) the width <<s>> of the air gap (14) in the depth direction of the cathode is smaller than the dark space gap required under operational conditions. <IMAGE>