| 摘要 |
PURPOSE:To enable to reduce the working manhours maintaining reliability in the data of measurement by a method wherein temperature is controlled by a cooling medium, and a measurement is performed on a semiconductor element in the atmosphere wherein generation of frost will be prevented. CONSTITUTION:Liquid nitrogen is introduced into a measuring chamber 6 from a nozzle 15 when liquid nitrogen is flowed from a pressure container 16. An opening-and-closing control is performed on an electromagnetic valve 17 using a temperature regulator 11 in order that a socket 7 and a press-tool 8 will be heated up to the prescribed temperature. When an IC3 is inserted into a socket 7 under the above-mentioned condition, the coming down press-tool 8 presses the lead and the socket terminal 13 of the IC3. As a result, a measurement starting signal is sent to a tester 4, and a measurement is automatically performed at the fixed low temperature. When the measurement is finished, the press-tool 8 goes up, and the IC3 removed from the socket 7 is selected as a defective or non-defective article. |
