| 发明名称 |
Semiconductor pressure transducer |
| 摘要 |
A semiconductor pressure transducer including a measuring diaphragm of semiconductor material for sensing pressure supported by a support member of the same material. An oxide layer and a thin glass layer are interposed between the measuring diaphragm and the support member.
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| 申请公布号 |
US4527428(A) |
申请公布日期 |
1985.07.09 |
| 申请号 |
US19820442665 |
申请日期 |
1982.12.30 |
| 申请人 |
HITACHI, LTD. |
发明人 |
SHIMADA, SATOSHI;YAMADA, KAZUJI;SUZUKI, SEIKOU;KOBORI, SHIGEYUKI;NISHIHARA, MOTOHISA |
| 分类号 |
G01L9/00;G01L13/02;(IPC1-7):G01L9/06 |
主分类号 |
G01L9/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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