MANUFACTURE OF VERTICAL-MAGNETIZATION MAGNETIC THIN FILM

摘要

PURPOSE:To enable the stable production of a vertical-magnetization magnetic thin film consisting of an rare earth-transition metal alloy with good reproducibility by subjecting a substrate on which a thin film is formed under specific conditions and perform a specific heat treatment. CONSTITUTION:A thin film made of an rare earth-transition metal group alloy comprising an axis of easy magnetization in a direction vertical to the film surface is so constituted that Y is included in the whole composition and an atomic ratio of a rare earth element R which consists of combination of the Y and at least one of Ce, Pr, Nd and Sm is 20-40atom% and the rest has a composition which consists of Co and is composed of a crystal RC03 phase and an amorphous part. A surface temperature of a substrate 11 is kept at 300-600 deg.C and a thin film 12 is formed on this substrate 11 by the means such as spattering, CVD or ion plating. Then the substrate 11 on which the film 12 is formed is cooled at a cooling speed of 100 deg.C in every 5min till the surface temperature decreases to 150-180 deg.C. Furthermore, the substrate 11 is kept in a state that the surface temperature is 150-180 deg.C for 15min-3hr and it is cooled down to room temperature.