FORMATION OF DEPOSITED FILM

摘要

PURPOSE:To attain enlargement, improvement of productivity and mass production of the title films by a method wherein an active compound containing germanium and halogen as well as another active compound produced from a carbon contained filming compound are separately fed to a filming space to form said films by means of irradiating them with photoenergy. CONSTITUTION:An active compound A produced by decomposing a germanium and halogen contained compound as well as another active compound B produced from a carbon contained filming compound chemically reacting to the former are separately fed to a filming space to form the title films on a substrate by means of irradiating them with photoenergy for making them chemically react to each other. The life of applicable active compound A is recommended to exceed 10 seconds in terms of productivity and easy handling while e.g. GeF4 etc. may be recommended for the germanium and halogen contained compound. Likewise methane or the like may be recommended for the hydrocarbonic compound. Finally the preferable weight ratio of active compounds B and A may be 8:2-4:6.