发明名称 SAMPLE EXCHANGING UNIT OF VACUUM DEVICE
摘要 PURPOSE:To make the unit small-sized by fixing yokes fitted to an exchanging bar to a shaft direction bearing, rotating magnets, and converting the rotating force of the exchanging bar into the thrust of a sample holder deceleration-wise. CONSTITUTION:When yokes 34, 35 and magnets 36, 37 are advanced, a yoke 25 is also advanced in a casing 14. At this time, a mobile bearing 23 is moved in the shaft direction, and an exchanging bar 15 is advanced slidingly on a shaft direction bearing 18. When the yoke 25 is advanced to an advance position 25c, a sample holder 5 screwed to the tip of the exchanging bar 15 is advanced from a sample exchange room 12 to the fitting/removing position of a sample room 1. The exchanging bar 15 is supported and rotated by bearings 20, 24 together with the yoke 25 and shaft direction bearing 18. In this case, the exchanging bar is rotated in the fixed position condition in the shaft direction. Accordingly, the shaft direction thrust larger than the magnetic binding force can be obtained, thus the unit can be made small-sized.
申请公布号 JPS60127646(A) 申请公布日期 1985.07.08
申请号 JP19830235776 申请日期 1983.12.14
申请人 NIPPON DENSHI KK 发明人 TAMAI MAKOTO
分类号 H01J37/20;H01J37/305;H01L21/027;H01L21/30 主分类号 H01J37/20
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