| 摘要 |
PURPOSE:To facilitate the correction for a minute tilt by setting a substrate block onto a minute angular transfer body which is minutely shifted by conduction-control for a piezo-electric element when the substrate block formed by arranging the thin-film magnetic head element group in a same direction is ground and polished. CONSTITUTION:A substrate block 21 to be worked is set onto the deformed body 23a of a minute angular transfer body 23 through an adhesion board 22. As for said minute angular transfer body 23, the interval (l) between the deformed body 23a and a holding body 23c opposed to the deformed body 23a is made smaller than the length of a piezo-electric element 24 before voltage application, and the minute angular transfer body 23a is deformed by a deformed part B so that a compression force is applied onto the piezo-electric element 24 at the time point when the piezo-electric element 24 is incorporated as shown in the figure, and the jolting of the system is removed. The deformed body 23a is set that the surface A is set in parallel to the worked surface when the deformed body 23a is shifted by applying a prescribed voltage Vo onto the piezo-electric element 24, and said deformed body 23a is tilted outwardly by the application of the voltage V'(>Vo), and the deformed body 23a is tilted inwardly by the application of the voltage V''(<Vo). |
