| 摘要 |
PURPOSE:The base plate is irradiated with ultraviolet rays in a mixed gas of hydrocarbon and hydrogen to effect the deposition of diamond by the pyrolysis of the hydrocarbon to produce diamond only in the form of particles or a film. CONSTITUTION:A base plate is irradiated with ultraviolet rays generated from a mercury lamp in a gas atmosphere containing hydrocarbon and hydrogen to effect the deposition of diamond. Such an element as that can be excited with light, but forms no compound by reacting with other substances can be combined with the mixture to help exciting mechanism. As such a gas, can be cited He, Ne, Ar or Xe. Since this process using photoreactions can be carried out even at about 1atm pressure, the maintenance of the installation is easy. Further, the base plate itself and the formed product are advantageously free from damage by plasma or beam shocks. |
