| 摘要 |
PURPOSE:To eliminate the contamination by C and improve the quality of aluminum nitride powder in nitriding a mixed powder of aluminum nitride and aluminum to synthesize the aimed aluminum nitride powder, by providing an aluminum nitride powder layer on the mixed powder. CONSTITUTION:A mixed powder 1 consisting of 20-80wt% aluminum nitride having <=10 microns particle diameter and 80-20wt% aluminum having <=10 microns particle diameter is contained in a carbon vessel 3. An aluminum nitride powder layer 2 is formed on the mixed powder 1. The carbon vessel 3 is then placed in a reaction tube 4, and the mixed powder 1 is heated at 600-1,000 deg.C with a heating element 5 while supplying N2 gas from one end of the reaction tube 4 thereinto to nitride the mixed powder and synthesize the aimed aluminum nitride powder.
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