| 摘要 |
PURPOSE:To perform a defect inspection on a pattern with higher precision by a method wherein the scanning rate is automatically changed with the length of a processing time to take for processing the pattern existing in a scanning region and the generation of the false defect at a time when the reference information and the scanning information are compared with each other is prevented. CONSTITUTION:Scanning data of one line component to a matter 18 to be ins pected are obtained in a stage unit 10 and the data are outputted to a control part 40, while in a video conversion unit 30, a reticle tape 31 for inspection reads out information having been recorded in a film located at a place corresponding to a reticle mask having been inspected through a magnetic tape control part 36 under the control of the CPU in the control unit 40 from the tape 31 and the information is supplied to a video signal conversion part 35. At this time, the scanning rate is ready being recorded in the subtrack of the tape 31 when the reticle tape 31 is produced, judging the length of a processing time for a pattern from the size and the roundness and fineness of the pattern. The output of the video signal conversion part 35 is compared with that of the unit 10 by the comparator 45 of the control unit 40. |
