| 摘要 |
PURPOSE:To permit to evacuate from an atmospheric pressure to a super high vacuum area by one set of pump by a method wherein either one set of a turbo molecular pump unit or a screw groove pump unit and a centrifugal pump unit are formed in the casing of the pump and these rotors are mounted onto a common rotating shaft. CONSTITUTION:Both of rotors 5, 4a are rotated through the common rotating shaft 6 in accordance with the driving of a motor 8 and gas from a suction port 9 is compressed by the kinetic blade 2a and the static blade 2b of the turbo molecular pump unit 2. Then, it is compressed in the screw groove pump unit 3 by the screw groove 3a of the outer periphery of the rotor 5 and a cylinder 3b. Further, it is compressed to a high pressure by the blades 4e...4e of the rotor 4 and stators 4b...4b in the centrifugal pump unit 4 and, thereafter, is discharged out of a discharging port 10. According to this method, evacuation from the atmospheric pressure to the super high vacuum area may be effected by one set of the pump and the auxiliary pump for a rough evacuating pump as before becomes unnecessary, further, the operation of the pump may be simplified.
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