| 摘要 |
PURPOSE:To improve reproducibility, controllability and uniformity by mixing a specific reducing material with TeO2 in the limited range of component compsn., subjecting the mixture to a heat treatment to form a sintered body in which a part of TeO2 is brought into reaction with the reducing material and mixing an additive material with such sintered body thereby forming a recording thin film. CONSTITUTION:TeO2 powder and a reducing material M are mixed in the form expressed by the formula. Metals such as Al, Si, Ti, V, Cd, In, Sn, Sb, Ta, W, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ge, Mo, Bi, Pb and Zn, semimetals or S, Se and C are used as the material M. The mixture is placed in a quartz boat after drying and is heat-treated in an inert gaseous atmosphere of N2, Ar, etc. in an electric furnace. The resultant sintered body is the assemblage of the M-Te alloy, M-O oxide and TeO2. An additive for improving or adding functions is mixed with such sintered body. The mixture 2 is put in a quartz vessel 3 in a vacuum system 1 and is heated from the outside by a coil heater 4 so that the thin TeOx (o<x<2) film contg. the additive is deposited and formed by evaporation on a substrate 6 installed on a supporting base 5. |
