发明名称 PERFECTIONNEMENTS AUX SUBSTRATS REVETUS D'UNE COUCHE MINCE D'OXYDE DE PLATINE, AUX DISPOSITIFS D'OBTENTION DES SUBSTRATS AINSI REVETUS, ET AUX PRODUITS OBTENUS A PARTIR DE TELS SUBSTRATS REVETUS
摘要 To coat a substrate with a thin layer of pure platinum oxide, an insulating and transparent substance, recourse is had to a cylindrical magnetron comprising means for generating an axial magnetic field in an enclosure containing rarefied oxygen, an axial cathode at least coated with platinum and a cylindrical grid forming an anode and coaxially surrounding the cathode so as to reserve an annular zone outside the grid. The substrate is placed in the said zone so that its surface to be coated by the thin layer is shielded from the impact of electrons. This shielding can be obtained by a particular shape given to the bars constituting the grid or by the positioning of obstacles in the said zone. It then suffices to heat the thin layer, whether or not locally, to above 250 DEG C., to convert it into conducting and opaque platinum.
申请公布号 FR2533071(B1) 申请公布日期 1985.07.05
申请号 FR19820015378 申请日期 1982.09.10
申请人 CENTRE NAL RECHERC SCIENTIFIQUE 发明人
分类号 H05K1/03;C23C14/00;C23C14/06;C23C14/08;C23C14/34;H01J37/34;H01L21/31;(IPC1-7):H01J37/34;C23C15/00 主分类号 H05K1/03
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