| 摘要 |
PURPOSE:To supply a liquid free from the mixing of air bubbles, in the defoaming treatment of a liquid capable of being used in a semiconductor and optical disk apparatus, by defoaming the liquid in a container under reduced pressure and further passing the defoamed liquid through pipings held under vacuum to emit the same. CONSTITUTION:An exhaust pump 5 is operated in such a state that valves 6, 8 are closed and valve 7 is opened to evacuate a space 3 and the defoaming of a UV resin 2 is performed. At the same time, valves 9, 17 are opened and an exhaust pupm 16 is operated to evcuate pipings 11, 12, 15, the valve 9 and a small tank 13. The vacuum degree of the small tank 13 is higher than that of the space 3. When the valve 8 is opened in this state, the resin 2 is dripped in the small tank 13 through the piping 15. When dripping begins, the valves 8, 7, 9 are closed while the valve 6 is opened to pressurize the space 3. If the valve 17 is closed and the piping 12 is detached from a joint 14 while the valve 8 is opened, the resin 2 is emitted and supplied from the opening of the piping 12 by the opening and closing of the valve 9.
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