| 摘要 |
PURPOSE:To improve precision and responsiveness by providing elastic means in a cylinder and also providing electrically connected inflow control valves along with outflow control valves in each port of the cylinder. CONSTITUTION:Elastic means 29, 30 are provided in a cylinder 20, while inflow control valves 24, 26 and outflow valves 25, 27 are provided in each port of the cylinder 20. Further, the inflow control valves 24, 26 and the outflow control valves 25, 27 are connected to a control device 28 so that these inflow and outflow control valves are put in side by side operation. Thus, since the elastic means 29 works as a stability securing element and flow control is performed by the inflow control valves 24, 26 and the outflow ocontrol valves 25, 27, responsiveness and precision of stoppage can be largely improved.
|
