发明名称 PELLET BONDER
摘要 PURPOSE:To put a pellet and a stem into high-accurate positioning by a method wherein the title device is composed of an image processing unit including a camera recognizing the pattern of pellets, an operation unit discriminating the state of positioning of the pellet to the center of the stem on the basis of its result, and a correction mechanism correcting the pellet position on the stem according to the output of judgement. CONSTITUTION:On a positioning mechanism 3 incorporating a heater 4, the pellet 1 with the stem 2 fixed to the back with solder 13 is accurately mounted by using a collet 5. Next, a cooling pipe 14 is provided above the pellet 1 in an oblique direction, the tip of which is then covered with an illuminating system 6, and the camera 8 is arranged above this via optical system 7. Thereafter, the image signals of the pellet 1 obtained by the camera 8 are transmitted to the image processing unit 9, and the positional slippage of the pellet 1 off from the center of the stem 2 is calculated out by processing the output in the operation unit 10. Next, a position correcting machine 11 is operated on the basis of the result, and then the position of the pellet 1 is corrected by means of a position correcting pawl 12.
申请公布号 JPS60124945(A) 申请公布日期 1985.07.04
申请号 JP19830233976 申请日期 1983.12.12
申请人 HITACHI SEISAKUSHO KK;HITACHI SETSUBI KOGYO KK 发明人 KANO HIDEO;SAKAI RIYUUICHIROU;HIRAYAMA HIDEO;KAWASAKI YOSHIFUMI;KIMURA TAKASHI
分类号 H01L21/52;H01L21/58;(IPC1-7):H01L21/58 主分类号 H01L21/52
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