发明名称 |
METHOD FOR REGULATING CONCENTRATION AND DISTRIBUTION OF OXYGEN IN CZOCHRALSKI GROWN SILICON |
摘要 |
Oxygen concentration and distribution within silicon crystal rods drawn according to the Czochralski process from silicon melt contained in a silica crucible, are regulated through variation of both the magnitude and relative sense of direction of seed and crucible rotation rates with uniform distribution of the oxygen being accomplished by increasing crucible rotation rate to preselected values as a function of crystal rod growth and melt consumption. |
申请公布号 |
DE3170781(D1) |
申请公布日期 |
1985.07.04 |
申请号 |
DE19813170781 |
申请日期 |
1981.12.24 |
申请人 |
MONSANTO COMPANY |
发明人 |
FREDERICK, ROGER ALLEN;MOODY, JERRY WOFFORD |
分类号 |
C30B15/20;C30B15/00;C30B15/30;C30B29/06;C30B31/16;(IPC1-7):C30B15/30 |
主分类号 |
C30B15/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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