| 摘要 |
PURPOSE:To contrive uniforming of the thickness and quality of a vapor-deposited film by providing a mesh electrode on a plane vertical to a proceeding direction of clusters on thermion attracting electrodes and by cooling these electrodes so as to converge the ions onto the center of a substrate and to prevent an increase in temperature of the substrate. CONSTITUTION:A meshed electrode 30 made of W which has a cooling water path inside it is arranged on a plane vertical to a proceeding direction of clusters on attracting electrodes 10 and potentials of the electrodes 30 and 10 are kept at the same level. By this constitution, infiltration of potential into a vapor generating source is eliminated and equal potential planes become parallel on the electrode 10 and a parallel electric field vertical to said equal potential planes is formed. Accordingly, cluster ions 16 proceed straight to a substrate and a distribution of the cluster ions 16 which are bombarded against the substrate becomes uniform and the thin film to be formed becomes uniform in the thickness and quality. |
