| 摘要 |
PURPOSE:To make automatization and overall check possible by constituting a device with an image pickup device, an illuminating device, an A/D converter, a picture memory, and a checking circuit and detecting optically an attaching member and checking the attaching state of a sample using it. CONSTITUTION:An illuminator 11 is lit, and an IC chip 1 is picked up by a TV camera 13, and its signal is subjected to A/D conversion in an A/D converter 23 through a camera driving circuit 22 and is stored in a picture memory 24, and an IC chip corner address is obtained on a basis of data of the memory 24 by a position detecting circuit 25. The IC chip 1 is picked up by an illuminator 12 and the camera 13, and the TV signal is stored in the memory 24, and checking is performed on a basis of this data by a fillet checking circuit 26, and it is decided whether die bonding is good or not by a deciding circuit 27. Thus, the attaching state of a sample 1 is checked automatically in accordance with the shape of a sample 1 is checked automatically in accordance with the shape of the attaching member, and high-speed overall check is possible. |
