| 摘要 |
PURPOSE:To prevent a short circuit between a cathode electrode film and a gate cathode by coating a defective hole generated in a surface stabilized film with a proper insulating film. CONSTITUTION:A cathode electrode film 5 is made of aluminum, and a surface stabilized film 7 consists of a composite film of phosphorus glass and silicon dioxide chemically attached to a thermal oxide film. Gate and cathode electrode films 4, 5 are formed through the boring of a window-evaporation-selective etching after shaping the surface stabilized film 7. A polyimide group resin is applied twice through a spin application method in order to form an insulating film on the surface stabilized film 7 thermally treated with an aluminum chelate liquid, and cured in air gas. The resin on the gate and cathode electrode films 4, 5 is removed through etching by photolithography, and a defective hole A is buried completely with the resin 8 fitted in this manner. Accordingly, a cathode electrode plate 6 is not brought into contact with a PB layer from the defective hole A even when the cathode electrode plate 6 is pushed and the cathode electrode film 5 is deformed. |
