| 摘要 |
PURPOSE:To improve conversion efficiency by forming laminated films of a conductive oxide, a metallic conductive film mainly comprising Al, Ag, Cu, Mg, Ti or Cr on a film consisting of said conductive oxide and an insulating film on the metallic conductive film on a nonsingular crystal semiconductor on a substrate and irradiating the laminated films with laser beams. CONSTITUTION:A light-transmitting conductive film such as one mainly comprising tin oxide, to which ITO or a halogen element such as fluorine is added, is formed extending over the whole upper surface of a light-transmitting substrate 1 with an insulating surface. An output of 0.3-3W is applied by a YAG laser processing machine, projecting laser beams are scanned, a first opened groove 13 is shaped and first electrodes 2 are formed in regions 31, 11 among each element. A nonsingular crystal semiconductor layer 3 generating photo-voltage on the electrodes 12 and the upper surface of the opened groove 13 by the projection of beams is formed. A second opened groove 18 is shaped extending over the side in the left direction of the first opened groove 13. Laminated films 4 in the back and a connecting section 30 are formed to the upper surface of the opened groove 18, and a third opened groove 20 for cutting and isolation is obtained by a third LS. |
