| 摘要 |
PURPOSE:To improve reliability of analysis by equalizing potential of the incident part of a particle beam in an electric field for mass analysis to the potential of a vacuum container for preventing particles from being accelerated before being incident to the electric field. CONSTITUTION:A changed particle beam 2 is incident fron an incident port 3 of a vacuum container 1 for being ionized and shaped at a charged exchange cell 4 including collimaters 8 and 9 while being introduced into a magnetic field composed of magnetic poles 5a and 5b and deflecting each particle by 180 deg. following a circular orbit. Next, while being put into an electric field composed of electrodes 6a and 6b insulated from the vacuum container and connected with power sources 23 and 24 while being deflected and indident to a two-dimensional position in a detector 7 to be fixed by mass and energy of each particle. Accordingly, by putting the electrode 6a in the higher potential than the earth potential and the electrode 6b in the low potential the correct analysis can be performed with no acceleration of particles on the incident part R. |
