| 摘要 |
PURPOSE:To enhance the reliability by eliminating a removable part by a method wherein a two-dimensional pattern having linear or dot-array patterns is enlarged and reduced in the line direction by means of an optical system including a cylindrical lens, and a one-dimensional pattern obtained is image-formed to a one-dimensional solid-state image pick-up element and thereafter converted into video signals, resulting in the recognition of the pattern position in terms of addresses showing the centers or peaks of crests. CONSTITUTION:A rotary table 7 is installed on an X-axis transfer table 8 and a Y-axis transfer table 10 superposed on each other, and a semiconductor wafer 6 having linear or dot-array patterns is mounted thereon; then, a mask 1 is arranged above the wafer at a micro interval. Next, lights from optical systems 13a and 13b respectively including cylindrical lenses are made incident to recognition patterns 3a and 3b provided on the mask 1, and the patterns produced by enlargement and reduction by means of the lenses 20 and 21 respectively are added to an operational circuit 30 via photo diode arrays 22a and 22b, 23a and 23b, resulting in arithmetic operation. Thus, the positions are detected by emphasizing the patterns and recognizing their addresses. |
