SECONDARY ELECTRON ENERGY ANALYZER

摘要

PURPOSE:To increase the capture effect of secondary electrons and improve S/N by providing a sliding plate that has permeation holes with a number of different diameters and that can be slided in opposition to the electron beam permeation hole of a support plate that supports a grid electrode. CONSTITUTION:The sample 10 of an integrated circuit element and such mounted on a printed circuit board 12 through the electron beam permeation holes of grid electrodes 3 to 5 mounted on a support plate 21 and the permeation holes of the support plate 21 is irradiated with an electron beam 8 and the secondary electrons 9 are detected by a secondary electron detector 7 such as scintillators. In this case, a sliding plate 22 with a number of combined electron beam 8 permeation and secondary electron extraction holes 23-26 with different diameters is engaged and inserted in the support plate 21 so as to be slided and the extraction hole to be used can be selected by sliding the sliding plate through manipulation. A a result, the secondary electron capture effect and S/N ratio can be increased and the accuracy of the electron beam probing can be improved.