| 摘要 |
PURPOSE:To observe cathode luminescence with invariably high resolution regardless of a scanning range by displacing a slit or reflecting mirror synchronously with the scanning of an electron beam, and guiding light from a sample into the slit. CONSTITUTION:The sample 4 is scanned in two dimensions with the electron beam through a scanning control part 8 and a deflecting coil 6. The fluorescent light from the sample 4 is converged on a spectroscope 24 through condenser lenses 21-23. A control signal from a control part 8 is supplied to the servomotor 28a of a slit driving part 28 to displace slits 30 and 32 through an actuator 28b synchronously with the scanning of the electron beam. Therefore, the converged light with specific width is incident from the entrance slit 30 and diffracted spectrally by a diffraction grating 36 to enter a detector 26 through the exit slit 32. Therefore, cathode luminescence is measured with high resolution regardless of the scanning range. |
