| 摘要 |
PURPOSE:To measure an optical constant of a material and a thin film while varying the wavelength of incident light by using a white light source as a light source and arranging a spectroscope in a light passage. CONSTITUTION:Light emitted from the white light source 11 is converted to parallel light by a collimator 12. Said light is converted to a linear polarization through a polarizer 13 and made incident on a sample 14. The reflected light passes through an analyzer 15, is made incident on the spectroscope 16, converted to monochromatic light and made incident on a photodetector 17. By varying the emitting wavelength of the spectroscope 16, the optical constants of the material and the thin film with respect to the various wavelengths of incident light beams are measured.
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