| 摘要 |
PURPOSE:To simplify the optical system of an ion source by arranging an optical fiber flux facing a sample in an ionization chamber while making it possible to connect its other end to both a laser light source and an observation means for observing the surface of a sample. CONSTITUTION:An ionization chamber 1 composed of an acceleration electrode 2 and a repeller 3 is provided inside a vacuum container 4 and a sample 5 is placed on a traveling stand 6 located inside while inserting an optical fiber flux 7 facing the sample 5. Further, the other end of the optical fiber flux 7 is enabled to be connected to a laser light source 8 and an observation means 9 as well to observe the surface of the sample 5 as occasion demands thus forming a mass spectrometer provided with a laser excitation type ion source. Accordingly, firstly the stand 6 is made to travel for setting the part of the sample 5 to be analyzed while observing the surface of the sample 5 followed by radiating laser light 11 while connecting it to the laser source 8 so as to simplify an optical system by making it to be used for both observation and irradiation in common. |
