发明名称 METHOD AND APPARATUS FOR SCANNING CYLINDRICAL SAMPLE OF ULTRASONIC MICROSCOPE
摘要 PURPOSE:To enable a stable observation, by rotating the cylindrical sample at a fixed circumferential velocity to move an ultrasonic wave transmitting/ receiving element and the cylindrical sample axially in a relative manner. CONSTITUTION:Rotor support sections 11 and 13 are movable in the directions of the arrows (a) and (c) and chucks 12 and 14 with an automatic centering mechanism are supported rotatably with the support sections 11 and 13 gripping both ends of a cylindrical sample 20. The observation range with an ultrasonic wave transmitting/receiving element 17 is possible in the circumferential direction of the sample 20 with a drive ring 19 and also possible in the axial direction of the sample with a support base 15 thereby enabling the observation of the entire circular side of the sample 20. In addition, the element 17 and the ring 19 can be adjusted vertically to allow the observation of a stepped sample 20. Moreover, the moving speed of the observing surface can be always kept constant regardless of the diameter of the sample 20 by turning the ring 19 at a fixed speed thereby enabling a stable observation.
申请公布号 JPS61196159(A) 申请公布日期 1986.08.30
申请号 JP19850036318 申请日期 1985.02.27
申请人 HITACHI LTD 发明人 IKENAGA KATSUJI;NAKAJIMA NOBUYUKI;TAKAI MASAO;UMEMOTO KOSHI
分类号 G01N29/06;G01N29/26 主分类号 G01N29/06
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